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Volumn 37, Issue 5 PART A, 1998, Pages
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Diamond tip arrays for parallel lithography and data storage
a a a b c |
Author keywords
Device fabrication; Diamond thin film; Field emitter array; Micromachine; Nanolithography; Surface modification
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Indexed keywords
ARRAYS;
DATA STORAGE EQUIPMENT;
DIAMOND FILMS;
ELECTRON DEVICE MANUFACTURE;
LITHOGRAPHY;
NANOTECHNOLOGY;
SILICON WAFERS;
SURFACE TREATMENT;
DIAMOND TIP ARRAYS;
FIELD EMITTER ARRAY;
MECHANICAL ABLATION;
MICROMACHINE;
MICROSIZED CARBON ISLAND;
ELECTRON DEVICES;
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EID: 0032073234
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.37.l562 Document Type: Article |
Times cited : (2)
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References (29)
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