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Volumn 37, Issue 5 PART A, 1998, Pages

Diamond tip arrays for parallel lithography and data storage

Author keywords

Device fabrication; Diamond thin film; Field emitter array; Micromachine; Nanolithography; Surface modification

Indexed keywords

ARRAYS; DATA STORAGE EQUIPMENT; DIAMOND FILMS; ELECTRON DEVICE MANUFACTURE; LITHOGRAPHY; NANOTECHNOLOGY; SILICON WAFERS; SURFACE TREATMENT;

EID: 0032073234     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l562     Document Type: Article
Times cited : (2)

References (29)
  • 19
    • 0345326607 scopus 로고
    • France
    • H. F. Gray: J. Phys. (France) 50 (1989) C8-67.
    • (1989) J. Phys. , vol.50
    • Gray, H.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.