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Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 915-921

PLD fabrication of a soft X-ray multilayer mirror and LPP reflectance test

(6) Weaver, I a Lewis, C L S a MacPhee, A G a Warwick, P J a Jordan, R b Lunney, J G b

a QUEEN'S UNIVERSITY BELFAST (United Kingdom)

b TRINITY COLLEGE DUBLIN (Ireland)

Author keywords

Molybdenum silicon (Mo Si) multilayer structure; PLD fabrication; Soft X ray

Indexed keywords

COMPUTATIONAL METHODS; DEPOSITION; GRAPH THEORY; ITERATIVE METHODS; LASER PRODUCED PLASMAS; LIGHT REFLECTION; MOLYBDENUM; OPTICAL MULTILAYERS; PULSED LASER APPLICATIONS; SILICON; SURFACE ROUGHNESS; X RAY APPARATUS;

PULSED LASER DEPOSITION (PLD); REFLECTANCE TESTS; SOFT X RAY MULTILAYER MIRRORS;

MIRRORS;

EID: 0032072312 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00766-6 Document Type: Article

Times cited : (13)

References (37)

1
- 36549095458
- D. Dijkkamp, T. Venkatesan, X.D. Wu, S.A. Shaheen, N. Jisrawi, Y.H. Min-Lee, W.L. McLean, M. Croft, Appl. Phys. Lett. 51 (1987) 619.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 619
- Dijkkamp, D.¹ Venkatesan, T.² Wu, X.D.³ Shaheen, S.A.⁴ Jisrawi, N.⁵ Min-Lee, Y.H.⁶ McLean, W.L.⁷ Croft, M.⁸

2
- 30844455436
- J.T. Cheung, H. Sankur, CRC Crit. Rev. Solid State Mater. Sci. 15 (1988) 63.
- (1988) CRC Crit. Rev. Solid State Mater. Sci. , vol.15 , pp. 63
- Cheung, J.T.¹ Sankur, H.²

3
- 0003592140
- Wiley, New York
- D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
- (1994) Pulsed Laser Deposition of Thin Films
- Chrisey, D.B.¹ Hubler, G.K.²

4
- 0019595851
- S.V. Gaponov, S.A. Gusev, B.M. Luskin, N.N. Salashchenko, E.S. Gluskin, Opt. Commun. 38 (1981) 7.
- (1981) Opt. Commun. , vol.38 , pp. 7
- Gaponov, S.V.¹ Gusev, S.A.² Luskin, B.M.³ Salashchenko, N.N.⁴ Gluskin, E.S.⁵

5
- 0026203061
- Ph. Macquart, F. Bridou, B. Pardo, Thin Solid Films 203 (1991) 77.
- (1991) Thin Solid Films , vol.203 , pp. 77
- Macquart, Ph.¹ Bridou, F.² Pardo, B.³

6
- 0000418634
- S.I. Zheludeva, M.V. Kovalchuk, N.N. Novikova, I.V. Bashelhanov, N.N. Salaschenko, A.D. Akhsakhalyan, Yu.Ya. Platonov, Rev. Sci. Instr. 63 (1992) 1519.
- (1992) Rev. Sci. Instr. , vol.63 , pp. 1519
- Zheludeva, S.I.¹ Kovalchuk, M.V.² Novikova, N.N.³ Bashelhanov, I.V.⁴ Salaschenko, N.N.⁵ Akhsakhalyan, A.D.⁶ Platonov, Yu.Ya.⁷

7
- 0026743623
- H. Mai, W. Pompe, Appl. Surf. Sci. 54 (1992) 215.
- (1992) Appl. Surf. Sci. , vol.54 , pp. 215
- Mai, H.¹ Pompe, W.²

8
- 0007564899
- T.W. Barbee, Opt. Eng. 25 (1986) 899.
- (1986) Opt. Eng. , vol.25 , pp. 899
- Barbee, T.W.¹

9
- 75749136933
- B.J. MacGowan, S. Mrowka, T.W. Barbee Jr., L.B. DaSilva, D.C. Eder, J.A. Koch, J.H. Underwood, in: X-ray Lasers 1992, Inst. Phys. Conf. Ser. No. 125, 1992, p. 269.
- (1992) X-ray Lasers 1992, Inst. Phys. Conf. Ser. No. 125 , vol.125 , pp. 269
- MacGowan, B.J.¹ Mrowka, S.² Barbee T.W., Jr.³ DaSilva, L.B.⁴ Eder, D.C.⁵ Koch, J.A.⁶ Underwood, J.H.⁷

10
- 0027572928
- R.E. Burge, M.T. Browne, P. Charalambous, G.E. Slark, P.J. Smith, C.L.S. Lewis, D. Neely, Opt. Lett. 18 (1993) 661.
- (1993) Opt. Lett. , vol.18 , pp. 661
- Burge, R.E.¹ Browne, M.T.² Charalambous, P.³ Slark, G.E.⁴ Smith, P.J.⁵ Lewis, C.L.S.⁶ Neely, D.⁷

11
- 0024931820
- S. Metev, K. Meteva, Appl. Surf. Sci. 43 (1989) 402.
- (1989) Appl. Surf. Sci. , vol.43 , pp. 402
- Metev, S.¹ Meteva, K.²

12
- 0000805346
- K. Reichelt, Vacuum 38 (1988) 1083.
- (1988) Vacuum , vol.38 , pp. 1083
- Reichelt, K.¹

13
- 0007568096
- D. van Vechten, G.K. Hubler, E.P. Donovan, F.D. Correll, J. Vac. Sci. Technol. A 8 (1990) 821.
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 821
- Van Vechten, D.¹ Hubler, G.K.² Donovan, E.P.³ Correll, F.D.⁴

14
- 0346428000
- E.J. Puik, S.W.M. van de Ven, W.J.J. Wolfis, G.E. van Dorssen, M.J. van de Wiel, Proc. SPIE 1547 (1991) 221.
- (1991) Proc. SPIE , vol.1547 , pp. 221
- Puik, E.J.¹ Van De Ven, S.W.M.² Wolfis, W.J.J.³ Van Dorssen, G.E.⁴ Van De Wiel, M.J.⁵

15
- 84956040422
- S. Itabashi, I. Okada, T. Kaneko, S. Matsuo, H. Yoshihara, J. Vac. Sci. Technol. A 10 (1991) 3312.
- (1991) J. Vac. Sci. Technol. A , vol.10 , pp. 3312
- Itabashi, S.¹ Okada, I.² Kaneko, T.³ Matsuo, S.⁴ Yoshihara, H.⁵

16
- 0027885526
- S.P. Vernon, D.G. Stearns, R.S. Rosen, Appl. Opt. 32 (1993) 6969.
- (1993) Appl. Opt. , vol.32 , pp. 6969
- Vernon, S.P.¹ Stearns, D.G.² Rosen, R.S.³

17
- 0001055537
- R.E. Muenchausen, K.M. Hubbard, S. Foltyn, R.C. Estler, N.S. Nogar, C. Jenkins, Appl. Phys. Lett. 56 (1990) 578.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 578
- Muenchausen, R.E.¹ Hubbard, K.M.² Foltyn, S.³ Estler, R.C.⁴ Nogar, N.S.⁵ Jenkins, C.⁶

18
- 0025559846
- C.N. Afonso, R. Serna, F. Catalina, D. Bermejo, Appl. Surf. Sci. 46 (1990) 249.
- (1990) Appl. Surf. Sci. , vol.46 , pp. 249
- Afonso, C.N.¹ Serna, R.² Catalina, F.³ Bermejo, D.⁴

19
- 0001360984
- I. Weaver, C.L.S. Lewis, J. Appl. Phys. 79 (1996) 7216.
- (1996) J. Appl. Phys. , vol.79 , pp. 7216
- Weaver, I.¹ Lewis, C.L.S.²

20
- 0000661722
- D. Lubben, S.A. Barnett, K. Suzuki, S. Gorbatkin, J.E. Greene, J. Vac. Sci. Technol. B 3 (1985) 968.
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 968
- Lubben, D.¹ Barnett, S.A.² Suzuki, K.³ Gorbatkin, S.⁴ Greene, J.E.⁵

21
- 0024908229
- H. Dupendant, J.P. Gavigan, D. Givord, A. Lienard, J.P. Rebouillat, Y. Souche, Appl. Surf. Sci. 43 (1989) 369.
- (1989) Appl. Surf. Sci. , vol.43 , pp. 369
- Dupendant, H.¹ Gavigan, J.P.² Givord, D.³ Lienard, A.⁴ Rebouillat, J.P.⁵ Souche, Y.⁶

22
- 0030563115
- I. Weaver, C.L.S. Lewis, Appl. Surf. Sci. 96-98 (1996) 663.
- (1996) Appl. Surf. Sci. , vol.96-98 , pp. 663
- Weaver, I.¹ Lewis, C.L.S.²

23
- 21544463328
- G. Koren, R.J. Baseman, A. Gupta, M.I. Lutwyche, R.B. Laibowitz, Appl. Phys. Lett. 56 (1990) 2144.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2144
- Koren, G.¹ Baseman, R.J.² Gupta, A.³ Lutwyche, M.I.⁴ Laibowitz, R.B.⁵

24
- 0342313604
- D.B. Chrisey, G.K. Hubler (Eds.), Wiley, New York
- L.-C. Chen, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994, p. 182.
- (1994) Pulsed Laser Deposition of Thin Films , pp. 182
- Chen, L.-C.¹

25
- 0001339098
- J. Zhang, P.J. Warwick, E. Wolfrum, M.H. Key, C. Danson, A. Demir, S. Healy, D.H. Kalantar, N.S. Kim, C.L.S. Lewis, J. Lin, A.G. MacPhee, D. Neely, J. Nilsen, G.J. Pert, R. Smith, G.J. Tallents, J.S. Wark, Phys. Rev. A 54 (1996) R4653.
- (1996) Phys. Rev. A , vol.54
- Zhang, J.¹ Warwick, P.J.² Wolfrum, E.³ Key, M.H.⁴ Danson, C.⁵ Demir, A.⁶ Healy, S.⁷ Kalantar, D.H.⁸ Kim, N.S.⁹ Lewis, C.L.S.¹⁰ Lin, J.¹¹ MacPhee, A.G.¹² Neely, D.¹³ Nilsen, J.¹⁴ Pert, G.J.¹⁵ Smith, R.¹⁶ Tallents, G.J.¹⁷ Wark, J.S.¹⁸

26
- 0343572244
- B.L. Henke, P. Lee, T.J. Tanaka, R.L. Shimabukuro, B.K. Fujikawa, At. Data Nucl. Data Tables 27 (1982) 1.
- (1982) At. Data Nucl. Data Tables , vol.27 , pp. 1
- Henke, B.L.¹ Lee, P.² Tanaka, T.J.³ Shimabukuro, R.L.⁴ Fujikawa, B.K.⁵

27
- 0347058217
- B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data Nucl. Data Tables 54 (1993) 1.
- (1993) At. Data Nucl. Data Tables , vol.54 , pp. 1
- Henke, B.L.¹ Gullikson, E.M.² Davis, J.C.³

28
- 36448998990
- E. van de Riet, C.J.C.M. Nillesen, J. Dieleman, J. Appl. Phys. 74 (1993) 2008.
- (1993) J. Appl. Phys. , vol.74 , pp. 2008
- Van De Riet, E.¹ Nillesen, C.J.C.M.² Dieleman, J.³

29
- 0027671526
- J.G. Lunney, J.F. Lawler, R. Aratari, J. Appl. Phys. 74 (1993) 4277.
- (1993) J. Appl. Phys. , vol.74 , pp. 4277
- Lunney, J.G.¹ Lawler, J.F.² Aratari, R.³

30
- 0039948510
- J.A. Trail, R.L. Byer, T.W. Barbee Jr., Appl. Phys. Lett. 52 (1988) 269.
- (1988) Appl. Phys. Lett. , vol.52 , pp. 269
- Trail, J.A.¹ Byer, R.L.² Barbee T.W., Jr.³

31
- 0026821997
- H. Azuma, Y. Watanabe, Y. Kata, T. Motohiro, S. Noda, K. Murai, Jpn. J. Appl. Phys. 31 (1992) L203, Part 2.
- (1992) Jpn. J. Appl. Phys. , vol.31 , Issue.2 PART
- Azuma, H.¹ Watanabe, Y.² Kata, Y.³ Motohiro, T.⁴ Noda, S.⁵ Murai, K.⁶

32
- 0027691509
- A.D. Akhsakhalyan, N.N. Kolachevsky, M.M. Mitropolsky, E.N. Ragozin, N.N. Salashchenko, V.A. Slemzin, Phys. Scr. 48 (1993) 516.
- (1993) Phys. Scr. , vol.48 , pp. 516
- Akhsakhalyan, A.D.¹ Kolachevsky, N.N.² Mitropolsky, M.M.³ Ragozin, E.N.⁴ Salashchenko, N.N.⁵ Slemzin, V.A.⁶

33
- 0017945894
- P.K. Carroll, E.T. Kennedy, G. O'Sullivan, Opt. Lett. 2 (1978) 72.
- (1978) Opt. Lett. , vol.2 , pp. 72
- Carroll, P.K.¹ Kennedy, E.T.² O'Sullivan, G.³

34
- 0006355997
- H.C. Gerritsen, H. van Brug, F. Bijkerk, M.J. van der Wiel, J. Appl. Phys. 59 (1986) 2337.
- (1986) J. Appl. Phys. , vol.59 , pp. 2337
- Gerritsen, H.C.¹ Van Brug, H.² Bijkerk, F.³ Van Der Wiel, M.J.⁴

35
- 0000623034
- J.M. Bridges, C.L. Cromer, T.J. McIlrath, Appl. Opt. 25 (1986) 2208.
- (1986) Appl. Opt. , vol.25 , pp. 2208
- Bridges, J.M.¹ Cromer, C.L.² McIlrath, T.J.³

36
- 0346427997
- PhD Thesis, The Queen's Univ. of Belfast, Belfast, N. Ireland
- A.G. MacPhee, PhD Thesis, The Queen's Univ. of Belfast, Belfast, N. Ireland, 1996.
- (1996)
- MacPhee, A.G.¹

37
- 0002559048
- O. Hunderi, Surf. Sci. 96 (1980) 1.
- (1980) Surf. Sci. , vol.96 , pp. 1
- Hunderi, O.¹

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