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Volumn 127-129, Issue , 1998, Pages 117-121

Photopolymers designed for laser ablation - Photochemical ablation mechanism

Author keywords

Excimer laser; Laser ablation; Mechanism; Photopolymer; Triazenopolymer

Indexed keywords

ADSORPTION; DECOMPOSITION; EXCIMER LASERS; INTERFEROMETRY; LIGHT REFLECTION; LIGHT TRANSMISSION; MASS SPECTROMETRY; POLYMERS; PULSED LASER APPLICATIONS;

EID: 0032070597     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00620-X     Document Type: Article
Times cited : (28)

References (20)
  • 1
    • 0003772130 scopus 로고
    • SPIE, The International Society for Optical Engineering, Bellingham
    • K. Jain, Excimer Laser Lithography, SPIE, The International Society for Optical Engineering, Bellingham, 1990.
    • (1990) Excimer Laser Lithography
    • Jain, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.