Excellent electrical characteristics of ultrafine trench isolation

Journal of the Electrochemical Society

Volumn 145, Issue 5, 1998, Pages 1684-1687

  Shiozawa, K ^a   Oishi, T ^a   Maeda, H ^a   Murakami, T ^a   Yasumura, K ^a   Abe, Y ^a   Tokuda, Y ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC FIELDS; ELECTRIC SPACE CHARGE; ION IMPLANTATION; SEMICONDUCTOR DEVICE MANUFACTURE;

ULTRAFINE TRENCH ISOLATION;

MOSFET DEVICES;

EID: 0032070003     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838539     Document Type: Article

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