Acid-catalyzed deprotection mechanism of tert-butyloxycarbonyloxy polymers in chemically amplified resists

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 36, Issue 7, 1998, Pages 1035-1042

  Ichikawa, Rieko ^a   Hata, Masayuki ^a   Okimoto, Noriaki ^a   Oikawa Handa, Setsuko ^a   Tsuda, Minoru ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

Acid catalyzed deprotection mechanism; Chemically amplified resist

Indexed keywords

ACTIVATION ENERGY; CARBONATES; CATALYSIS; MOLECULAR DYNAMICS; PH EFFECTS; PHENOLS; PHOTOCHEMICAL REACTIONS;

ACID CATALYZED DEPROTECTION MECHANISM; CHEMICALLY AMPLIFIED RESISTS; TERT BUTYLOXYCARBONYLOXY POLYMERS;

AROMATIC POLYMERS;

EID: 0032069896     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0518(199805)36:7<1035::AID-POLA1>3.0.CO;2-1     Document Type: Article

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