Acid-catalyzed degradation mechanism of poly(phthalaldehyde): Unzipping reaction of chemical amplification resist

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 35, Issue 1, 1997, Pages 77-89

  Tsuda, Minoru ^a   Hata, Masayuki ^a   Nishida, Rie ^a   Oikawa, Setsuko ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDS; ACTIVATION ENERGY; CATALYSIS; CATALYSTS; DEGRADATION; MONOMERS; ORGANIC POLYMERS; REACTION KINETICS;

ACID CATALYZED DEGRADATION MECHANISM; CATIONIC HYDROXYL COMPOUNDS; CHEMICAL AMPLIFICATION RESISTS; MOLECULAR ORBITAL THEORY; POLY(PHTHALALDEHYDE); PROTONATION; UNZIPPING REACTION;

PHOTORESISTS;

EID: 0030733347     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0518(19970115)35:1<77::AID-POLA9>3.0.CO;2-#     Document Type: Article

References (17)