Correlation between surface morphology and lattice orientation of microcrystalline silicon

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 391-396

  Kondo, M ^a   Nishimiya, T ^a   Saitoh, K ^a   Ohe, T ^a   Matsuda, A ^a  

^a 1 1 4 Umzono Tsukuba 305   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CRYSTAL LATTICES; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; ION BOMBARDMENT; MOLECULAR BEAM EPITAXY; MORPHOLOGY; SEMICONDUCTING SILICON; STABILITY; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS;

LATTICE ORIENTATION; MICROCRYSTALLINE SILICON; SILICON HYDROGEN BONDING MODE;

SEMICONDUCTING FILMS;

EID: 0031352160     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-391     Document Type: Conference Paper

References (6)