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Volumn 409, Issue 1-3, 1998, Pages 33-36

Study of AlN coatings for microstrip gas chambers

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON EMISSION; FILM PREPARATION; MICROSTRIP DEVICES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS; SUBSTRATES; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032066398     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(97)01229-1     Document Type: Article
Times cited : (2)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.