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Volumn 409, Issue 1-3, 1998, Pages 33-36
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Study of AlN coatings for microstrip gas chambers
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRON EMISSION;
FILM PREPARATION;
MICROSTRIP DEVICES;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING FILMS;
SUBSTRATES;
THERMAL EFFECTS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ALUMINUM NITRIDE;
MICROSTRIP GAS CHAMBERS;
PARTICLE DETECTORS;
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EID: 0032066398
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-9002(97)01229-1 Document Type: Article |
Times cited : (2)
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References (6)
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