Effects of ion beam mixing on the depth profiles of thin metal layer in TiO2

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 141, Issue 1-4, 1998, Pages 467-471

  Miyagawa, S ^a   Baba, K ^b   Nakao, S ^a   Ikeyama, M ^a   Saitoh, K ^a   Miyagawa, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Technology Cent of Nagasaki   (Japan)

Author keywords

Ion beam mixing; Sol gel method; TiO2

Indexed keywords

ION BEAMS; ION BOMBARDMENT; LIGHT ABSORPTION; METALLIC FILMS; METALLIC SUPERLATTICES; MIXING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIP COATINGS; ION BEAM MIXING;

TITANIUM DIOXIDE;

EID: 0032064862     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00156-6     Document Type: Article

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