High performance amorphous silicon image sensor arrays

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 1306-1310

  Street, R A ^a   Apte, R B ^a   Granberg, T ^b   Mei, P ^a   Ready, S E ^a   Shah, K S ^c   Weisfield, R L ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b XEROX CORPORATION   (United States)

^c RADIATION MONITORING DEVICES INC   (United States)

Author keywords

Amorphous silicon; Polysilicon film; Sensor fill factor

Indexed keywords

LEAD COMPOUNDS; LEAKAGE CURRENTS; PHOTOCONDUCTING DEVICES; THIN FILMS;

AMORPHOUS SILICON IMAGE SENSOR ARRAYS; POLYSILICON FILMS; SENSOR FILL FACTORS; THIN FILM TRANSITIONS (TFT);

AMORPHOUS SILICON;

EID: 0032064324     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00315-9     Document Type: Article

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