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Volumn 19, Issue 4, 1998, Pages 131-133

Nonscaling of MOSFET's linear resistance in the deep submicrometer regime

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; SEMICONDUCTOR DOPING; SUBSTRATES;

EID: 0032047730     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.663537     Document Type: Article
Times cited : (14)

References (13)
  • 1
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    • C. Mazurè and M. Orlowski, "Guidelines for reverse short-channel behavior," IEEE Electron Device Lett., vol. 10, p. 556, 1989.
    • (1989) IEEE Electron Device Lett. , vol.10 , pp. 556
    • Mazurè, C.1    Orlowski, M.2
  • 3
    • 0037834069 scopus 로고
    • Fabrication of sub-50-nm gate length n-metal-oxide-semiconductor field effect transistors and their electrical charactersitics
    • M. Ono, M. Saito, T. Yoshitomi, C. Fiegna, T. Ohguro, H. S. Momose, and H. Iwai, "Fabrication of sub-50-nm gate length n-metal-oxide-semiconductor field effect transistors and their electrical charactersitics," J. Vac. Sci. Technol., vol. 13, pp. 1740-1743, 1995.
    • (1995) J. Vac. Sci. Technol. , vol.13 , pp. 1740-1743
    • Ono, M.1    Saito, M.2    Yoshitomi, T.3    Fiegna, C.4    Ohguro, T.5    Momose, H.S.6    Iwai, H.7
  • 4
    • 0027878002 scopus 로고
    • Sub-50-nm gate length N-MOSFET's with 10-nm phosphorus source and drain junction
    • M. Ono, M. Saito, T. Yoshitomi, C. Fiegna, T. Ohguro, and H. Iwai, "Sub-50-nm gate length N-MOSFET's with 10-nm phosphorus source and drain junction," in IEDM Tech. Dig., 1993, p. 119.
    • (1993) IEDM Tech. Dig. , pp. 119
    • Ono, M.1    Saito, M.2    Yoshitomi, T.3    Fiegna, C.4    Ohguro, T.5    Iwai, H.6
  • 6
    • 84949083566 scopus 로고
    • On the accuracy of channel length characterization of LDD MOSFET's
    • J. C. Sun, M. R. Wordeman, and S. E. Laux. "On the accuracy of channel length characterization of LDD MOSFET's." IEEE Trans. Electron Devices, vol. ED-33, p. 1556, 1986.
    • (1986) IEEE Trans. Electron Devices , vol.ED-33 , pp. 1556
    • Sun, J.C.1    Wordeman, M.R.2    Laux, S.E.3
  • 7
    • 0030129710 scopus 로고    scopus 로고
    • An effective channel length determination method for LDD MOSFET's
    • Apr.
    • K. Takeuchi, N. Kasai, T. Kunio, and K. Terada, "An effective channel length determination method for LDD MOSFET's," IEEE Trans. Electron Devices, vol. 43, p. 580, Apr. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , pp. 580
    • Takeuchi, K.1    Kasai, N.2    Kunio, T.3    Terada, K.4
  • 10
    • 0023570547 scopus 로고
    • Gate-voltage-dependent effective channel length and series resistance of LDD MOSFET's
    • G. J. Hu, C. Chang, and Y. Chia. "Gate-voltage-dependent effective channel length and series resistance of LDD MOSFET's." IEEE Trans. Electron Devices, vol. ED-34, p. 2469, 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 2469
    • Hu, G.J.1    Chang, C.2    Chia, Y.3
  • 11
    • 0020717155 scopus 로고
    • 2 interface as determined by a time-of-flight technique
    • 2 interface as determined by a time-of-flight technique," J. Appl. Phys., vol. 54, pp. 1445-1456, 1983.
    • (1983) J. Appl. Phys. , vol.54 , pp. 1445-1456
    • Cooper, J.A.1    Nelson, D.F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.