Synthesis of metal oxide thin films by liquid-phase deposition method

Journal of Materials Research

Volumn 13, Issue 4, 1998, Pages 883-890

  Deki, Shigehito ^a   Aoi, Yoshifumi ^b  

^a KOBE UNIVERSITY   (Japan)

^b RYUKOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; HYDROLYSIS; OXIDES; SUBSTRATES; THIN FILMS;

LIQUID PHASE DEPOSITION; METAL OXIDE THIN FILM;

SYNTHESIS (CHEMICAL);

EID: 0032047064     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0119     Document Type: Article

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