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Volumn 186, Issue 4, 1998, Pages 565-570
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The use of experiment charts for the fabrication of porous silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC OXIDATION;
ETHANOL;
HYDROFLUORIC ACID;
POROSITY;
POROUS MATERIALS;
THICKNESS MEASUREMENT;
EXPERIMENT CHARTS;
POROUS SILICON;
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EID: 0032046641
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00830-0 Document Type: Article |
Times cited : (4)
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References (15)
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