Using SSA to measure the efficacy of automated defect data gathering

MICRO

Volumn 16, Issue 4, 1998, Pages 27-33

  Tobin, Kenneth W ^a,b,c,d,e,f   Gleason, Shaun S ^a,g   Karnowski, Thomas P ^a,c,g,h   Guidry, David ^b,i,j,k,l  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b Knights Technology   (United States)

^c R and D ^*  (United States)

^d OPTICAL SOCIETY OF AMERICA   (United States)

^e VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^f UNIVERSITY OF VIRGINIA   (United States)

^g UNIVERSITY OF TENNESSEE   (United States)

^h NORTH CAROLINA STATE UNIVERSITY   (United States)

ⁱ Knights Technol Div of Electroglas   (United States)

^j PHILIPS RESEARCH LABORATORIES   (Germany)

^k UNIVERSITY OF CALIFORNIA   (United States)

^l LONDON BUSINESS SCHOOL   (United Kingdom)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; AUTOMATION; COMPUTER SOFTWARE; COMPUTER VISION; CRYSTAL DEFECTS; DATA REDUCTION; PATTERN RECOGNITION; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; SUBROUTINES; TECHNOLOGY;

DEFECT DISTRIBUTION CHARACTERISTICS; SIGNATURE ANALYSIS LIBRARY; SPATIAL PATTERN RECOGNITION SOFTWARE; SPATIAL SIGNATURE ANALYSIS;

MICROELECTRONIC PROCESSING;

EID: 0032046530     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. The National Technology Roadmap for Semiconductors, San Jose, SIA, pp 153-173, 1997.
2. Tobin K, Gleason S, Lakhani F, and Bennett M, "Automated Analysis for Rapid Defect Sourcing and Yield Learning," Oak Ridge, TN, Oak Ridge National Laboratory, October 1997.
3. Gleason SS, Tobin KW, and Karnowski TP, "Spatial Signature Analysis of Semiconductor Defects," Solid State Technology, 39(7):127-136, 1996.
4. Tobin KW, Gleason SS, Karnowski TP, and Bennett MH, "An Image Paradigm for Semiconductor Defect Data Reduction," presented at SPIE 1996 International Symposium on Microlithography, Santa Clara, CA, March 1996.
5. Tobin KW, "Semiconductor Spatial Signature Analysis (SSA)," Oak Ridge, TN, Oak Ridge National Laboratory, 1994.