Aluminium deposition on SF6 plasma-treated polycarbonate: An AFM, XPS and mass spectroscopy study

Surface and Interface Analysis

Volumn 26, Issue 4, 1998, Pages 306-315

  Seidel, C ^a   Gotsmann, B ^a   Kopf, H ^a   Reihs, K ^b   Fuchs, H ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

^b BAYER AG   (Germany)

Author keywords

AFM; Mass spectroscopy; Plasma; Polycarbonate; SF6; XPS, SFM

Indexed keywords

ADHESION; ALUMINUM; ATOMIC FORCE MICROSCOPY; DEPOSITION; FLUORINE; MASS SPECTROMETRY; METALLIZING; MORPHOLOGY; PLASMA ETCHING; SULFUR COMPOUNDS; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

SULFUR HEXAFLUORIDE;

POLYCARBONATES;

EID: 0032045920     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199804)26:4<306::AID-SIA374>3.0.CO;2-V     Document Type: Article

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