High-resolution secondary ion mass spectrometry depth profiling of superconducting thin films

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 237-240

  Montgomery, N J ^a,c   MacManus Driscoll, J L ^a   McPhail, D S ^a   Chater, R J ^a   Moeckly, B ^b   Char, K ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b Conductus ^*  (United States)

^c RICARDO UK LTD   (United Kingdom)

Author keywords

Secondary ion mass spectrometry; Superconductivity; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; LASER ABLATION; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY; SUPERCONDUCTING FILMS;

ANGLE OF INCIDENCE; DECAY LENGTH; DEPTH PROFILING;

THIN FILMS;

EID: 0032045632     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00523-3     Document Type: Article

References (11)

1. M. Matsubara, I. Hirabayashi, Appl. Surf. Sci. 82-83 (1994) 494.
2. C.L. Jia, B. Kabius, H. Soltner, U. Poppe, K. Urban, Physica C 172 (1990) 81.
3. S. Rozeveld, K.L. Merkle, K. Char, J. Mater. Res. 11 (2) (1996) 281.
4. Y. Li, J.A. Kilner, T.J. Tate, M.J. Lee, R.J. Chater, H. Fox, R.A. DeSouza, P.G. Quincey, Phys. Rev. B 51 (1995) 8501.
5. J.C. Amante, J.D. Cawley, J. Kim, T.R. Lemberger, in: T.O. Manson, J.L. Routbout (Eds.), Ceramic Transactions. Am. Ceram. Soc., Vol. 24 (1991) 303.
6. A.L. Vasiliev, E. Olsson, Ju. Boikov, T. Claeson, N.A. Kiselev, Physica C 253 (1995) 297.
7. S. Rozeveld, K.L. Merkle, K. Char, J. Mater. Res. 11 (2) (1996) 281.
8. S. Hofmann, Appl. Surf. Sci. 70-71 (1993) 9.
9. N.J. Montgomery, D.S. McPhail, Mickrochemica Acta S13 (1996) 419-424.
10. N.J. Montgomery, D.S. McPhail, Proceedings SIMS X (Munster) (1997) 415.
11. N.J. Montgomery, J.L. MacManus-Driscoll, D.S. McPhail, B. Moeckly, K. Char, J. Metals Alloys 251 (1997) 355.