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Volumn 67, Issue 11, 1996, Pages 3961-3964
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Equipment for in situ resistivity and x-ray diffraction studies during ion implantation at temperatures between 4 K and 1270 K
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0346905969
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1147299 Document Type: Article |
Times cited : (3)
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References (17)
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