Parameter extraction of resistive thermal microsensors by AC electrical method

IEEE Transactions on Instrumentation and Measurement

Volumn 47, Issue 2, 1998, Pages 403-408

  Ou Yang, Mang ^a   Sheen, Chin Shown ^b   Shie, Jin Shown ^b  

^a National Science Council   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

AC electrical method thermal variables measurement; Electrothermal effect; Parameter extraction; Thermal microsensors

Indexed keywords

ELECTRIC CONDUCTANCE; ELECTRIC RESISTANCE; MICROSENSORS; SPECIFIC HEAT OF SOLIDS; THERMAL VARIABLES MEASUREMENT; THERMOELECTRICITY;

THERMAL MICROSENSORS;

BOLOMETERS;

EID: 0032035649     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.744182     Document Type: Article

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