Optimizing the fabrication of aluminum-coated fiber probes and their application to optical near-field lithography

Ultramicroscopy

Volumn 71, Issue 1-4, 1998, Pages 65-71

  Madsen, S ^a,b   Holme, N C R ^b   Ramanujam, P S ^b   Hvilsted, S ^b   Hvam, J M ^b   Smith, S J ^c  

^a DME Danish Micro Engineering A/S   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

Fabrication of fiber probes; Optical near field lithography

Indexed keywords

ALUMINUM; COATING TECHNIQUES; OPTICAL FIBER FABRICATION; OPTIMIZATION; PHOTOLITHOGRAPHY; PROBES; QUALITY ASSURANCE; SURFACE ROUGHNESS;

AZOBENZENE POLYESTER; OPTICAL NEAR FIELD LITHOGRAPHY; PULLING; SCANNING NEAR FIELD OPTICAL MICROSCOPE;

OPTICAL FIBERS;

ALUMINUM; AZOBENZENE; HYDROGEN; POLYESTER; SILICON;

ARTICLE; FIBER; HEATING; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

EID: 0032033568     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00095-8     Document Type: Article

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