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Thin Solid Films

Volumn 316, Issue 1-2, 1998, Pages 100-104

Characterization of cementite films prepared by electron-shower-assisted PVD method

(5) Li, S J a Ishihara, M a Yumoto, H a Aizawa, T b Shimotomai, M c

a TOKYO UNIVERSITY OF SCIENCE (Japan)

b UNIVERSITY OF TOKYO (Japan)

c JFE STEEL CORPORATION (Japan)

Author keywords

Cementite film; Electron shower assisted PVD; Single phase

Indexed keywords

ELASTIC MODULI; FILM PREPARATION; GRAIN SIZE AND SHAPE; HARDNESS; THERMAL EFFECTS; VAPOR DEPOSITION;

CEMENTITE FILMS; ELECTRON SHOWER ASSISTED PLASMA VAPOR DEPOSITION;

METALLIC FILMS;

EID: 0032027593 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)00397-6 Document Type: Article

Times cited : (45)

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