Wafer distribution system for a clean room using a novel magnetic suspension technique

IEEE/ASME Transactions on Mechatronics

Volumn 3, Issue 1, 1998, Pages 73-78

  Park, K H ^a   Ahn, K Y ^b   Kim, S H ^b   Kwak, Y K ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Linear transport system; Magnetic suspension; Magnetically levitated system; Wafer distribution system

Indexed keywords

CLEAN ROOMS; FEEDBACK CONTROL; MAGNETIC LEVITATION; PERMANENT MAGNETS; SEMICONDUCTOR DEVICE TESTING; SILICON WAFERS; SYSTEM STABILITY;

LINEAR TRANSPORT SYSTEM; MAGNETIC SUSPENSION; WAFER DISTRIBUTION SYSTEM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032026750     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.662871     Document Type: Article

References (9)

1. B. Hardegen and A. P. Lane, "Testing particle generation by a wafer handling robot," Solid State Technol., vol. 28, no. 3, pp. 189-195, Mar. 1985.
2. P. Borden, "The nature of particle generation in vacuum process tools," IEEE Trans. Semiconductor Manufact., vol. 3, pp. 189-194, Nov. 1990.
3. C. M. Osburn, "Reassessing contamination control requirements as DRAM capacities reach 16 Mb," Micro-contamination, vol. 9, no. 7, pp. 19-27, 76, July 1991.
4. T. Azukizawa, M. Morishita, S. Kanda, N. Tamura, and T. Yokoyama, "A linear induction motor control system for magnetically levitated carrier system," IEEE Trans. Veh. Technol., vol. 38, pp. 102-108, May 1989.
5. T. Onuki and Y. Toda, "Optimal design of hybrid magnet in Maglev system with both permanent and electro magnets," IEEE Trans. Magn., vol. 29, pp. 1783-1786, Mar. 1993.
6. K. Yoshida, "Dynamic simulation of controlled-PM LSM Maglev carrier taking into account six degrees of freedom," presented at ISEM Seoul, Seoul, Korea, June 1994, Paper TP-46.
7. K. H. Park, K. B. Choi, S. H. Kim, and Y. K. Kwak, "Magnetic levitated high precision positioning system based on antagonistic mechanism," IEEE Trans. Magn., vol. 32, pp. 208-219, Jan. 1996.
8. H. P. Neff, Jr., Basic Electromagnetic Fields. New York: Harper & Row, 1981.
9. D. T. Greenwood, Principles of Dynamics. Englewood Cliffs, NJ: Prentice-Hall, 1965.