-
1
-
-
0025672437
-
Magnetic levitation-based microautomation of mechanical processes in semiconductor fabrication
-
Napa Valley, CA
-
I. Busch-Vishniac, S. J. Chen, M. C. Jeong, "Magnetic levitation-based microautomation of mechanical processes in semiconductor fabrication," Proc. IEEE MEMS '90, Napa Valley, CA, 1990.
-
(1990)
Proc. IEEE MEMS '90
-
-
Busch-Vishniac, I.1
Chen, S.J.2
Jeong, M.C.3
-
2
-
-
0019141767
-
Piezo-electric micro manipulator in multi-degree of freedom with tactile sensibility
-
Y. Umetani and H. Suzuki, "Piezo-electric micro manipulator in multi-degree of freedom with tactile sensibility," 10th Intern. Symp. Industrial Robots, 1980, pp. 571-579.
-
(1980)
10th Intern. Symp. Industrial Robots
, pp. 571-579
-
-
Umetani, Y.1
Suzuki, H.2
-
3
-
-
0025627079
-
Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
-
Napa Valley, CA, feb., 11-14
-
T. Higuchi, Y. Yamagata, K. Furutani, and K. Kudoh, "Precise positioning mechanism utilizing rapid deformations of piezoelectric elements," IEEE Micro Electro Mech. Syst., Napa Valley, CA, feb., 11-14, 1990.
-
(1990)
IEEE Micro Electro Mech. Syst.
-
-
Higuchi, T.1
Yamagata, Y.2
Furutani, K.3
Kudoh, K.4
-
4
-
-
0004209952
-
Micro actuator using shape memory alloy for micro robot
-
K. Kuribayashi, "Micro actuator using shape memory alloy for micro robot," Inter. Conf. Advanced Mechatronics, 1989, pp. 109-114.
-
(1989)
Inter. Conf. Advanced Mechatronics
, pp. 109-114
-
-
Kuribayashi, K.1
-
5
-
-
0023310725
-
Design considerations for practical electrostatic micro motor
-
nov.
-
W. S. Trimmer and K. J. Gabriel, "Design considerations for practical electrostatic micro motor," Sensors and Actuators, pp. 189-206, nov. 1897.
-
(1897)
Sensors and Actuators
, pp. 189-206
-
-
Trimmer, W.S.1
Gabriel, K.J.2
-
6
-
-
0023587178
-
Electrostatic actuators for micromechatronics
-
Hyannis, MA, nov.
-
H. Fujita and A. Omodaka, "Electrostatic actuators for micromechatronics," IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, nov., 1987.
-
(1987)
IEEE Micro Robots and Teleoperators Workshop
-
-
Fujita, H.1
Omodaka, A.2
-
7
-
-
0025644075
-
Operation of microfabricated harmonic and ordinary side-drive motors
-
Napa Valley, CA, feb.
-
M. Mehregany, P. Nagarkar, S. Senturia, and J. Lang, "Operation of microfabricated harmonic and ordinary side-drive motors," IEEE Micro Electro Mech. Syst., Napa Valley, CA, feb., 1990.
-
(1990)
IEEE Micro Electro Mech. Syst.
-
-
Mehregany, M.1
Nagarkar, P.2
Senturia, S.3
Lang, J.4
-
8
-
-
0006029330
-
Magnetically driven micropositioners
-
oct.
-
D. Smith and S. Elrod, "Magnetically driven micropositioners," Review of Scientific Instruments, vol. 56, no. 10, oct., 1985, pp. 1970-1971.
-
(1985)
Review of Scientific Instruments
, vol.56
, Issue.10
, pp. 1970-1971
-
-
Smith, D.1
Elrod, S.2
-
9
-
-
0023575207
-
Magnetic supported intelligence hand for automated precise assembly
-
M. Tsuda, T. Higuchi, and S. Fujiwara, "Magnetic supported intelligence hand for automated precise assembly," Proc. Conf. on Industrial Electronic, Control and Instrumentation, SPIE vol. 805, 1987, pp. 926-933.
-
(1987)
Proc. Conf. on Industrial Electronic, Control and Instrumentation, SPIE
, vol.805
, pp. 926-933
-
-
Tsuda, M.1
Higuchi, T.2
Fujiwara, S.3
-
10
-
-
0026170948
-
A six degree-of-freedom magnetically levitated variable compliance fine motion wrist: Design, modeling and control
-
june
-
R. L. Hollis, A. P. Allan, and S. Salcudean, "A six degree-of-freedom magnetically levitated variable compliance fine motion wrist: design, modeling and control," IEEE Trans. Robotics and Automat., vol. 7, no. 3, june, 1991, pp. 320-332.
-
(1991)
IEEE Trans. Robotics and Automat.
, vol.7
, Issue.3
, pp. 320-332
-
-
Hollis, R.L.1
Allan, A.P.2
Salcudean, S.3
-
11
-
-
33747700092
-
Three-dimensional actuators for optical head
-
H. Ohnuki and Y. Fukui, "Three-dimensional actuators for optical head," SPIE Optical Disk Tech., vol. 329, 1982, pp. 103-108.
-
(1982)
SPIE Optical Disk Tech.
, vol.329
, pp. 103-108
-
-
Ohnuki, H.1
Fukui, Y.2
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