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Volumn 32, Issue 1, 1996, Pages 208-219

Magnetic levitated high precision positioning system based on antagonistic mechanism

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM ANALYSIS; DEGREES OF FREEDOM (MECHANICS); EQUATIONS OF MOTION; FRICTION; MAGNETIC CIRCUITS; MATHEMATICAL MODELS; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SYSTEM STABILITY; VIBRATIONS (MECHANICAL);

EID: 0029755319     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.477573     Document Type: Article
Times cited : (17)

References (15)
  • 1
    • 0025672437 scopus 로고
    • Magnetic levitation-based microautomation of mechanical processes in semiconductor fabrication
    • Napa Valley, CA
    • I. Busch-Vishniac, S. J. Chen, M. C. Jeong, "Magnetic levitation-based microautomation of mechanical processes in semiconductor fabrication," Proc. IEEE MEMS '90, Napa Valley, CA, 1990.
    • (1990) Proc. IEEE MEMS '90
    • Busch-Vishniac, I.1    Chen, S.J.2    Jeong, M.C.3
  • 2
    • 0019141767 scopus 로고
    • Piezo-electric micro manipulator in multi-degree of freedom with tactile sensibility
    • Y. Umetani and H. Suzuki, "Piezo-electric micro manipulator in multi-degree of freedom with tactile sensibility," 10th Intern. Symp. Industrial Robots, 1980, pp. 571-579.
    • (1980) 10th Intern. Symp. Industrial Robots , pp. 571-579
    • Umetani, Y.1    Suzuki, H.2
  • 3
    • 0025627079 scopus 로고
    • Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
    • Napa Valley, CA, feb., 11-14
    • T. Higuchi, Y. Yamagata, K. Furutani, and K. Kudoh, "Precise positioning mechanism utilizing rapid deformations of piezoelectric elements," IEEE Micro Electro Mech. Syst., Napa Valley, CA, feb., 11-14, 1990.
    • (1990) IEEE Micro Electro Mech. Syst.
    • Higuchi, T.1    Yamagata, Y.2    Furutani, K.3    Kudoh, K.4
  • 4
    • 0004209952 scopus 로고
    • Micro actuator using shape memory alloy for micro robot
    • K. Kuribayashi, "Micro actuator using shape memory alloy for micro robot," Inter. Conf. Advanced Mechatronics, 1989, pp. 109-114.
    • (1989) Inter. Conf. Advanced Mechatronics , pp. 109-114
    • Kuribayashi, K.1
  • 5
    • 0023310725 scopus 로고
    • Design considerations for practical electrostatic micro motor
    • nov.
    • W. S. Trimmer and K. J. Gabriel, "Design considerations for practical electrostatic micro motor," Sensors and Actuators, pp. 189-206, nov. 1897.
    • (1897) Sensors and Actuators , pp. 189-206
    • Trimmer, W.S.1    Gabriel, K.J.2
  • 8
    • 0006029330 scopus 로고
    • Magnetically driven micropositioners
    • oct.
    • D. Smith and S. Elrod, "Magnetically driven micropositioners," Review of Scientific Instruments, vol. 56, no. 10, oct., 1985, pp. 1970-1971.
    • (1985) Review of Scientific Instruments , vol.56 , Issue.10 , pp. 1970-1971
    • Smith, D.1    Elrod, S.2
  • 10
    • 0026170948 scopus 로고
    • A six degree-of-freedom magnetically levitated variable compliance fine motion wrist: Design, modeling and control
    • june
    • R. L. Hollis, A. P. Allan, and S. Salcudean, "A six degree-of-freedom magnetically levitated variable compliance fine motion wrist: design, modeling and control," IEEE Trans. Robotics and Automat., vol. 7, no. 3, june, 1991, pp. 320-332.
    • (1991) IEEE Trans. Robotics and Automat. , vol.7 , Issue.3 , pp. 320-332
    • Hollis, R.L.1    Allan, A.P.2    Salcudean, S.3
  • 11
    • 33747700092 scopus 로고
    • Three-dimensional actuators for optical head
    • H. Ohnuki and Y. Fukui, "Three-dimensional actuators for optical head," SPIE Optical Disk Tech., vol. 329, 1982, pp. 103-108.
    • (1982) SPIE Optical Disk Tech. , vol.329 , pp. 103-108
    • Ohnuki, H.1    Fukui, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.