Structural and compositional studies of magnetron-sputtered Nd-Fe-B thin films on Si(100)

Journal of Materials Science

Volumn 33, Issue 5, 1998, Pages 1349-1357

  Muralidhar, G K ^a   Window, B ^b   Sood, D K ^a   Zmood, R B ^a  

^a RMIT UNIVERSITY   (Australia)

^b CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARGON; FILM PREPARATION; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); MAGNETRON SPUTTERING; NEODYMIUM ALLOYS; SILICA; SILICON; SPUTTER DEPOSITION; STOICHIOMETRY; XENON;

DIRECT CURRENT MAGNETRON SPUTTERING; NEODYMIUM IRON BORIDE;

MAGNETIC THIN FILMS;

EID: 0032026514     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004314801755     Document Type: Article

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