Effects of plasma bombardment on the initial growth of (Ba,Sr)TiO3 films and their properties

Journal of the American Ceramic Society

Volumn 81, Issue 3, 1998, Pages 768-772

  Tsai, Wen Chou ^a   Tseng, Tseung Yuen ^a,b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; FERROELECTRIC MATERIALS; FILM GROWTH; MAGNESIA; PERMITTIVITY; PLASMA APPLICATIONS; PLATINUM; SILICA; SILICON; SURFACE ROUGHNESS; TITANIUM OXIDES;

PLASMA BOMBARDMENT;

DIELECTRIC FILMS;

EID: 0032023491     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1998.tb02409.x     Document Type: Article

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