Room-temperature oxidation of a GaAs(001) surface induced by the interaction of hyperthermal atomic oxygen and studied by x-ray photoelectron spectroscopy and ion scattering spectroscopy

Applied Physics Letters

Volumn 72, Issue 12, 1998, Pages 1469-1471

  Wolan, John T ^a   Mount, Charles K ^a   Hoflund, Gar B ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; COMPOSITION; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRON ENERGY LEVELS; SEMICONDUCTING GALLIUM ARSENIDE; SPURIOUS SIGNAL NOISE; SPUTTERING; SURFACE TREATMENT; THERMAL EFFECTS; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON STIMULATED DESORPTION; HYPERTHERMAL ATOMIC OXYGEN; ION SCATTERING SPECTROSCOPY; ROOM TEMPERATURE;

OXIDATION;

EID: 0032021971     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120595     Document Type: Article

References (17)

1. C. D. Thurmond, G. P. Schwartz, G. W. Kammlott, and B. Schwartz, J. Electrochem. Soc. 127, 1366 (1980).
2. G. B. Hoflund and J. F. Weaver, Meas. Sci. Technol. 5, 201 (1994).
3. G. B. Hoflund, Scanning Electron Microsc. IV, 1392 (1985).
4. J. T. Wolan, W. S. Epling, and G. B. Hoflund, J. Appl. Phys. 81, 6160 (1997).
5. Handbook of X-ray Photoelectron Spectroscopy, edited by C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder, and G. E. Muilenberg (Perkin-Elmer, Eden Prairie, MN, 1979).
6. G. B. Hoflund, in Handbook of Surface and Interface Analysis: Methods in Problem Solving, edited by J. C. Rivière and S. Myhra (Marcel Dekker, New York, NY, 1998), p. 57.
7. J. T. Wolan, C. K. Mount, and G. B. Hoflund, J. Vac. Sci. Technol. A 15, 2502 (1997).
8. J. T. Wolan and G. B. Hoflund, J. Vac. Sci. Technol. A (to be published).
9. T. A. Carlson and G. E. McGuire, J. Electron Spectrosc. Relat. Phenom. 1, 161 (1972/73).
10. B. J. Flinn and N. S. McIntyre, Surf. Interface Anal. 15, 19 (1990).
11. M. R. Davidson, G. B. Hoflund, and R. A. Outlaw, J. Vac. Sci. Technol. A 9, 1344 (1991).
12. V. Y. Young and G. B. Hoflund, Anal. Chem. 60, 269 (1988).
13. V. Y. Young, G. B. Hoflund, and A. C. Miller, Surf. Sci. 235, 60 (1990).
14. O. Melendez, G. B. Hoflund, R. E. Gilbert, and V. Y. Young, Surf. Sci. 251/252, 228 (1991).
15. V. Y. Young, N. Welcome, and G. B. Hoflund, Phys. Rev. B 48, 2891 (1993).
16. S. D. Gardner, G. B. Hoflund, M. R. Davidson, and D. R. Schryer, J. Catal. 115, 69 (1989).
17. S. D. Gardner, G. B. Hoflund, D. R. Schryer, and B. T. Upchurch, J. Phys. Chem. 95, 835 (1991).