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Volumn 100-101, Issue 1-3, 1998, Pages 469-473
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Excimer lamp-induced decomposition of palladium metalorganic films for electroless copper plating
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Author keywords
Catalytic metal; Electroless metal plating; Excimer lamp; Metalorganic films; Photo inducing processing
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Indexed keywords
COPPER;
ELECTROLESS PLATING;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
ORGANOMETALLICS;
PALLADIUM COMPOUNDS;
PHOTOLYSIS;
PRESSURE EFFECTS;
SPECTROPHOTOMETRY;
SUBSTRATES;
ULTRAVIOLET RADIATION;
EXCIMER LAMPS;
SURFACE TREATMENT;
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EID: 0032021901
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00673-7 Document Type: Article |
Times cited : (13)
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References (11)
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