Characterization of P+ implanted SiO2 powders

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 1996, Pages 816-819

  Kajiyama, Kenji ^a   Suzuki, Yasuo ^a   Kokubo, Tadashi ^a   Kawashita, Masakazu ^a   Miyaji, Fumiaki ^a  

^a Ion Engineering Research Inst   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROANALYSIS; PHOSPHORUS; POWDERS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SECONDARY ION MASS SPECTROMETRY; SILICA; SUBSTRATES; SURFACE STRUCTURE; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON PROBE MICROANALYSIS (EPMA); ELUSION;

ION IMPLANTATION;

EID: 0030369709     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)