Oxygen depth profiling in TiOx/SiO2 prepared by sol-gel method using 16O(α, α)16O resonant backscattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 557-562

  Miyagawa, Y ^a   Saitoh, K ^a   Nakao, S ^a   Nonami, T ^a   Kato, K ^a   Taoda, H ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; CATALYSIS; CATALYSTS; DEPOSITION; ION BEAMS; OXYGEN; PHOTOCHEMICAL REACTIONS; SILICA; SOL-GELS; THIN FILMS;

DEPTH PROFILING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); PHOTOCATALYSTS; RESONANT BACKSCATTERING ANALYSIS;

TITANIUM OXIDES;

EID: 0032019714     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00742-8     Document Type: Article

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