Surface structure of hydrogen terminated (1 0 0) Si by medium energy ion scattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1112-1115

  Takai, M ^a   Taketani, M ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; HYDROFLUORIC ACID; RELAXATION PROCESSES; SCATTERING; SILICON; SURFACE STRUCTURE; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

MEDIUM ENERGY ION SCATTERING;

NUCLEAR INSTRUMENTATION;

EID: 0032019283     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)80021-9     Document Type: Article

References (8)

1. K. Oura, M. Naitoh, F. Shoji, Microbeam Analysis 2 (1993) 139.
2. R.M. Tromp, R.G. Smeenk, F.W. Saris, Surf. Sci. 104 (1981) 13.
3. J.J. Boland, Surf. Sci. 261 (1992) 17.
4. Y. Nakagawa, A. Ishitani, T. Takahagi, H. Kuroda, H. Tokumoto, M. Ono, K. Kajimura, J. Vac, Sci. Technol. A8 (1990) 262.
5. Y. Morita, H. Tokumoto, Appl. Phys. Lett. 67 (1995) 2654.
6. W.C. Turkenburg, W. Soszka, F.W. Saris, H.H. Kersten, B.G. Colenbrander, Nucl. Instr. and Meth. 132 (1976) 587.
7. M. Takai, M. Taketani, N. Yokoi, Nucl. Instr. and Meth. B 118 (1996) 552.
8. A. Kinomura, M. Takai, S. Namba, Y. Agawa, Nucl. Instr. and Meth. B 64 (1992) 576.