A modified learning strategy for neural networks to support spectroscopic ellipsometric data evaluation

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 149-155

  Rédei, László ^a,b   Fried, Miklós ^a   Bársony, István ^a   Wallinga, Hans ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Backpropagation neural networks; Porous Si; SIMOX; Spectroscopic ellipsometry

Indexed keywords

APPROXIMATION THEORY; BACKPROPAGATION; ERROR ANALYSIS; FEEDFORWARD NEURAL NETWORKS; LEARNING ALGORITHMS; POROUS SILICON; SPECTROMETRY;

ROOT MEAN SQUARED ERRORS (RMSE); SEPARATION BY IMPLANTATION BY OXYGEN (SIMOX);

ELLIPSOMETRY;

EID: 0031998603     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00802-X     Document Type: Article

References (9)

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