Optical properties in infra-red region of nitrogen-incorporated amorphous carbon films

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 491-494

  Chen, Z Y ^a   Yu, Y H ^a   Zhao, J P ^a   Wang, X ^a   Yang, S Q ^a   Shi, T S ^a   Liu, X H ^a   Wong, S P ^b   Wilson, I H ^b   Xu, J B ^b   Luo, E Z ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Amorphous carbon: Optical: Infra red; Computer simulation

Indexed keywords

CARBON; COMPUTER SIMULATION; FILMS; INFRARED RADIATION; NITRIDING; NITROGEN; OPTICAL PROPERTIES;

GRAPHITE-LIKE STRUCTURE;

AMORPHOUS MATERIALS;

EID: 0031995622     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00242-2     Document Type: Article

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