Absolute concentration, temperature, and velocity measurements in a diamond depositing dc-arcjet reactor

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 165-169

  Juchmann, Wolfgang ^a   Luque, Jorge ^b   Wolfrum, Jürgen ^a   Jeffries, Jay B ^b  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b SRI INTERNATIONAL   (United States)

Author keywords

Chemical vapor deposition; Laser induced fluorescence; Plasma diagnostics

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; FLUORESCENCE; PLASMA DIAGNOSTICS;

DC-ARCJET REACTOR;

FILM GROWTH;

EID: 0031995334     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00177-5     Document Type: Article

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