Studies of defects and impurities in diamond thin films

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 250-254

  Sharda, T ^a   Sikder, A K ^a   Misra, D S ^a   Collins, A T ^b   Bhargava, S ^c   Bist, H D ^c   Veluchamy, P ^d   Minoura, H ^d   Kabiraj, D ^e   Awasthi, D K ^e   Selvam, P ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b KING'S COLLEGE LONDON   (United Kingdom)

^c INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^d GIFU UNIVERSITY   (Japan)

^e INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

Luminescence; Micro Raman spectroscopy; Silicon impurity; Thin film diamond

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEFECTS; IMPURITIES; LUMINESCENCE; PLASMAS; RAMAN SPECTROSCOPY; SILICON; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS;

DIAMOND FILMS;

EID: 0031995285     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00265-3     Document Type: Article

References (33)

1. R.E. Clausing, L.L. Horton, J.C. Angus, P. Koidl (Eds.), Diamond and Diamond-like Films and Coatings, Plenum Press, New York, 1991.
2. A.T. Coilins, M. Kamo, Y. Sato, J. Phys. D 22 (1989) 1402.
3. A.T. Collins, M. Kamo, Y. Sato, J. Mater. Res. 5 (1990) 2507.
4. A.T. Collins, Diamond Relat. Mater. 1 (1992) 457.
5. A.T. Collins, L. Allers, C.J.H. Wort, G.A. Scarsbrook, Diamond Relat. Mater. 3 (1994) 932.
6. J. Ruan, W.J. Choyke, W.D. Partlow, J. Appl. Phys. 69 (1991) 6632.
7. J. Ruan, K. Kobashi, W.J. Choyke, Appl. Phys. Lett. 60 (1992) 1884.
8. L.H. Robins, L.P. Cook, E.N. Farabaugh, A. Feldman, Phys. Rev. B 39 (1989) 13367.
9. R.J. Graham, T.D. Moustakas, M.M. Disko, J. Appl. Phys. 69 (1991) 3212.
10. Y.L. Khong, A.T. Collins, L. Allers, Diamond Relat. Mater. 3 (1994) 1023.
11. J. Ruan, W.J. Choyke, K. Kobashi, Appl. Phys. Lett. 62 (1993) 1379.
12. Y.H. Singh, D.H. Rich, F.S. Pool, J. Appl. Phys. 71 (1992) 6036.
13. X. Yang, A.V. Barnes, M.M. Albert, R.G. Albridge, J.T. McKinley, N.H. Tolk, J.L. Davidson, J. Appl. Phys. 77 (1995) 1758.
14. Z. Zhang, K. Liao, W. Wang, Thin Solid Films 269 (1995) 108.
15. G.Z. Cao, J.J. Schermer, W.J.P. van Enckevort, W.A.L.M. Elst, L.J. Giling, J. Appl. Phys. 79 (1996) 1357.
16. T. Feng, B.D. Schwartz, J. Appl. Phys. 73 (1993) 1415.
17. C.D. Clark, C.B. Dickerson, Surf. Coat. Technol. 47 (1991) 336.
18. J. Ruan, W.J. Choyke, W.D. Partlow, Appl. Phys. Lett. 58 (3991) 295.
19. C.D. Clark, H. Kanda, I. Kiflawi, G. Sittas, Phys. Rev. B 51 (1995) 16681.
20. G. Dollinger, A. Bergmaier, C.M. Frey, M. Roesler, H. Verhoeven, Diamond Relat. Mater. 4 (1995) 591.
21. A.T. Collins, S.H. Robertson, J. Mater. Sci. Lett. 4 (1985) 681.
22. R.J. Graham, in: T.D. Moustakas, J.I. Pankove, Y. Hamakawa (Eds.), Wide Band Gap Semiconductors, Vol. 242, Materials Research Society, Pittsburg, PA. p. 97.
23. R.C. Eden, Diamond Relat. Mater. 2 (1993) 1051.
24. T. Sharda, D.S. Misra, D.K. Avasthi, G.K. Mehta, Solid State Commun. 98 (1996) 879.
25. W. Banholzer, Surf. Coat. Technol. 53 (1992) 1.
26. T. Sharda, D.S. Misra, D.K. Avasthi, Vacuum 47 (1996) 1259.
27. F. Silva, A. Gicquel, A. Tardieu, P. Cledat, Th. Chauveau, Diamond Relat. Mater. 5 (1996) 338.
28. L.S. Pan, D.R. Kania, Diamond: Electronic Properties and Applications, Kluwer Academic, London, 1995.
29. R. Samlenski, C. Haug, R. Brenn, C. Wild, R. Locher, P. Koidl, Appl. Phys. Lett. 67 (1994) 2798.
30. M. Marinelli, A. Hatta, T. Ito, A. Hiraki, T. Nishino, Appl. Phys. Lett. 68 (1996) 1631.
31. B.B. Pate, Surf. Sci. 165 (1986) 83.
32. B.R. Stoner, G.H.M. Ma, S.D. Wolter, J.T. Glass, Phys. Rev. B 45 (1992) 11067.
33. M.M. Waite, S.I. Shah, Appl. Phys. Lett. 60 (1992) 2344.