Sensitivity limits of strain mapping procedures using high-resolution electron microscopy

Journal of Microscopy

Volumn 190, Issue 1-2, 1998, Pages 184-189

  Seitz, H ^a   Ahlborn, K ^b   Seibt, M ^b   Schroter W ^b  

^a SIMEC GmbH and Co OHG   (Germany)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Image recording; Specimen preparation techniques; Strain detection limit; Strain mapping; Subpixel resolution

Indexed keywords

CCD CAMERAS; HIGH RESOLUTION ELECTRON MICROSCOPY; IMAGE RECORDING; MAPPING;

DETECTION LIMITS; INTENSITY DISTRIBUTION; PREPARATION TECHNIQUE; SENSITIVITY LIMIT; SPECIMEN PREPARATION TECHNIQUE; STRAIN DETECTION; STRAIN DETECTION LIMIT; STRAIN MAPPING; SUBPIXEL RESOLUTION; TWO-DIMENSIONAL;

SPECIMEN PREPARATION;

ALGORITHM; DIGITAL FILTERING; IMAGE ANALYSIS; PHOTOGRAPHY; PRIORITY JOURNAL; REVIEW; STRAIN DIFFERENCE; TRANSMISSION ELECTRON MICROSCOPY; VIDEORECORDING;

EID: 0031896717     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1998.3100866.x     Document Type: Review

References (21)

1. x/Si hetero-structures by Rutherford backscattering spectrometry and channeling, analytical electron microscopy and double crystal X-ray diffractometry. Microsc. Microanal. Microstruct. 3, 363-284.
2. Bayle, P., Deutsch, T., Gilles, B., Lancon, F., Marty, A. & Thibault, J. (1994) Quantitative analysis of the deformation and chemical profiles of strained multilayers. Ultramicroscopy, 56, 94-107.
3. Bierwolf, R., Hohenstein, M., Philip, F., Brandt, O., Crook, G.E. & Ploog, K. (1993) Direct measurement of local lattice distortions in strained layer structures by HREM. Ultramicroscopy, 49, 273-285.
4. Gibson, J.M. & McDonald, M.L. (1987) Improving signal-to-noise limits in high resolution transmission electron microscopy. Mat. Res. Soc. Proc. 82, 109-113.
5. Ikarashi, N., Akimoto, K., Tatsumi, T. & Ishida, K. (1994a) Ordered structure at Si/Ge interfaces. Phys. Rev. Lett. 72, 3198-3201.
6. Ikarashi, N., Tanaka, M., Baba, T., Sakaki, S. & Ishida, K. (1994b) High-resolution transmission electron microscopy of Si/Ge structures. Jpn. J. Appl. Phys. 33, 1228-1233.
7. Jouneau, P.H., Tardot, A., Feuillet, G., Mariette, H. & Cibert, J. (1994) Strain mapping of ultrathin epitaxial ZnTe and MnTe layers embedded in CdTe. J. Appl. Phys. 75, 7310-7316.
8. Kilaas, R., Paciornik, S., Schwartz, A.J. & Tanner, L.E. (1994) Quantitative analysis of atomic displacements in HRTEM images. J. Computer-Assist. Microsc. 6, 129-138.
9. Marks, L.D. (1996) Wiener-filter enhancement of noisy HREM images. Ultramicroscopy, 62, 43-52.
10. Paciornik, S., Kilaas, R. & Dahmen, U. (1993) Asscsement of specimen noise in HREM images of simple structures. Ultramicroscopy, 50, 255-262.
11. Robertson, M.D., Currie, J.E., Corbett, J.M. & Webb, J.B. (1995) Determination of elastic strains in epitaxial layers by HREM. Ultramicroscopy, 58, 175-184.
12. Rosenauer, A., Kaiser, S., Reisinger, T., Zweck, T., Gebhardt, W. & Gerthsen, D. (1996) Digital analysis of high resolution transmission electron microscopy lattice images. Optik, 102, 63-69.
13. Rosenauer, A., Reisinger, T., Steinkirchner, E., Zweck, J. & Gebhardt. W. (1995) High resolution transmission electron microscopy determination of Cd diffusion in CdSe/ZnSe single quantum well structures. J. Cryst. Growth, 152, 42-50.
14. Schuhrke, T., Mändl, M., Zweck, J. & Hoffmann, H. (1992) Investigation of surface amorphization of silicon wafers during ion-milling. Ultramicroscopy, 41, 429-433.
15. Scott, C.P., Craven, A.J., Hatto, P. & Davies, C. (1996) TEM crosssection preparation with minimal ion milling time. J.Microsc. 182, 186-191.
16. Seitz, H. (1992) Chemische- und Verzerrungsanalyse mit nahezu atomarer Auflösung in der hochauflösenden Elektronenmikroskopie. Diploma Thesis, Göttingen (in German).
17. Seitz, H. (1996) Messung tetragonaler Verzerrung in Halbleiter-Heterostrukturen mit quasi-atomarer Auflösung. Thesis, Göttingen (Cuvillier-Verlag, Göttingen ISBN 3-89588-734-X) (in German).
18. Seitz, H., Seibt, M., Baumann, F.H., Ahlborn, K. & Schröter. W. (1995) Quantitative strain mapping using high-resolution electron microscopy. Phys. Stat. Solidi. (a), 150, 625-634.
19. Stobbs, W.M. & Stobbs, S.H. (1993) Spatial coherence effects in the use of high resolution approaches for the characterisation of the composition abruptness of an interface. Ultramicroscopy, 52, 267-275.
20. Tapfer, L. & Ploog, K. (1989) X-ray interference in ultrathin epitaxial layers: a versatile method for the structural analysis of single quantum wells and heterointerfaces. Phtys. Rev. B, 40, 9802-9810.
21. Treacy, M.M.J. & Gibson, J.M. (1986) The effects of elastic relaxation on transmission electron microscopy studies of thinned composition-modulated materials. J. Vac. Sci. Technol. B, 4, 1458-1466.