Improvements to differential voltage contrast and light and electron scanning beam analysis of solar cells

Scanning

Volumn 20, Issue 2, 1998, Pages 104-105

  Therrien, J ^a   Mil'shtein, S ^a  

^a University of Massachusetts   (United States)

Author keywords

Differential voltage contrast; Scanning electron microscopy; Solar cell

Indexed keywords

SILICON;

ARTICLE; DEVICE; ELECTRIC POTENTIAL; ELECTRON BEAM; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SOLAR CELL;

EID: 0031842389     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200207     Document Type: Article

References (4)

1. Mil'shtein S: Beam testing of the electrical field in semiconductor devices. Microelectr Engin 31, 3-12 (1996)
2. Mil'shtein S: Measurement of quasi Fermi energy by scanning electron beam. Appl Phys Lett 71, 10,1406-1409 (1997)
3. Mil'shtein S, Themen J: Computerized testing of semiconductors. Patent Application #08757468 (1996)
4. Mil'shtein S, Baker B, latrou S, Kharas D, Bell RO: Light and electron beams scanning of solar cells. Mat Sci Forum 473, 325-329 (1995)