Beam testing of the electrical field in semiconductor devices

Microelectronic Engineering

Volumn 31, Issue 1-4, 1996, Pages 3-12

  Mil'shtein, S ^a  

^a University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPUTER APPLICATIONS; ELECTRIC FIELD MEASUREMENT; ELECTRON BEAMS; MESFET DEVICES; MOSFET DEVICES; QUANTUM WELL LASERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DIODES; SOLAR CELLS;

DIFFERENTIAL VOLTAGE CONTRAST; ELECTRIC POTENTIAL DISTRIBUTION; QUASI-FERMI ENERGIES; VOLTAGE DROP;

SEMICONDUCTOR DEVICE TESTING;

EID: 0030086163     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00320-7     Document Type: Article

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