Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope

Scanning

Volumn 20, Issue 5, 1998, Pages 404-409

  Gillen, Greg ^a   Wight, Scott ^a   Bright, David ^a   Herne, Tonya ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electron scattering; Environmental scanning electron microscopy; Secondary ion mass spectrometry; Selfassembled monolayers

Indexed keywords

ARTICLE; ELECTRON BEAM; IMAGE ANALYSIS; MASS SPECTROMETRY; PRIORITY JOURNAL; RADIATION DOSE; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY;

EID: 0031784162     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200506     Document Type: Article

References (15)

1. Bache IC, Kitching S, Theil BL, Donald AM: Variations in the probe beam broadening with operating conditions in ESEM: Monte-Carlo simulations and EDX measurements. Microsc Microanal 3, (suppl) 2, 1211-1212 (1997)
2. Bilde-Sorensen JB, Appel CC: X-ray spectrometry in ESEM and LVSEM: Corrections for beam skirt effects. Proc 49th Ann Meeting of the Scandinavian Society for Electron Microscopy, SCAN-DEM-97 (1997)
3. Bright DS: MacLispix: A special purpose public domain image analysis program for the Macintosh. Microbeam Anal 4, 151-163 (1995)
4. Danilatos GD: Introduction to the ESEM instrument. MR&T 25, 354-361 (1993)
5. Doehne E, Bower NW: Empirical evaluation of the electron skirt in the environmental SEM: Implications for energy dispersive x-ray analysis. (Eds. Armstrong JT, Porter JR) Microbeam Anal 2, S35-S36 (1993)
6. Gilpin C, Sigee DC: X-ray microanalysis of wet biological specimens in the environmental scanning electron microscope. J Microsc 179, Pt. 1, 22-28 (1995)
7. Gillen G, Wight S, Bennett J, Tarlov M: Patterning of self-assembled alkanethiol monolayers on silver by microfocus ion and electron beam bombardment Appl Phys Lett 65(5), 534-536 (1994a)
8. Gillen G, Bennett J, Tarlov M, Burgess D: Molecular ion imaging secondary ion mass spectrometry for the characterization of patterned self-assembled monolayers on silver and gold. Anal Chem 66, 2170-2174 (1994b)
9. Gillen G, Roberson S, Tarlov M, Herne T: SIMS characterization of patterned DNA probes on gold surfaces. In Secondary Ion Mass Spectrometry: SIMS X A. (Eds. Benninghoven A, Hagenhoff B, Werner HW). John Wiley and Sons, Chichester (1997) 831-834
10. Griffith BJ: Effects of chamber pressure and accelerating voltage on x-ray resolution in the ESEM. Proc 50th Annual Meeting of the Electron Microscopy Society of America. San Francisco Press (1992) 1324-1325
11. Griffith BJ, Trautman RL, Coffey J: X-ray resolution at low chamber pressures and chamber gas fluorescence in the Electroscan ESEM. Microbeam Anal (Eds. Armstrong JT, Porter JR) 2, S37-S38 (1993)
12. Joy DC: Modeling the electron-gas interaction in low-vacuum SEMs. In Microscopy and Microanalysis 1996 (Eds: Bailey GW, Corbett JM, Dimlich RVW, Michael JR, Zaluzec NJ), San Francisco Press (1996) 836-837
13. Wight S: Electron behavior in the gaseous environment of the environmental scanning electron microscope chamber. In Microscopy and Microanalysis 1996 (Eds. Bailey GW, Corbett JM, Dimlich RVW, Michael JR, Zaluzec NJ), San Francisco Press (1996) 838-839
14. Wight S, Gillen G, Herne T: SIMS imaging of electron beam scattering in the environmental SEM. Scanning 19, 71-74 (1997)
15. Wight S: In preparation (1998)