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Volumn 264-268, Issue PART 2, 1998, Pages 1149-1152
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Optical properties of GaN films grown on SiC/Si
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Author keywords
CVD; Photoluminescence; Uniformity; X ray diffraction
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
FILM GROWTH;
PHOTOLUMINESCENCE;
SAPPHIRE;
SEMICONDUCTING GALLIUM COMPOUNDS;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR GROWTH;
SILICON CARBIDE;
SILICON ON INSULATOR TECHNOLOGY;
SILICON WAFERS;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
FULL WIDTH AT HALF MAXIMUM (FWHM);
SEMICONDUCTING GALLIUM NITRIDE;
SEMICONDUCTING FILMS;
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EID: 0031699028
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.264-268.1149 Document Type: Article |
Times cited : (1)
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References (3)
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