EDS elemental mapping of a DRAM with an FE-TEM

Journal of Electron Microscopy

Volumn 47, Issue 4, 1998, Pages 335-343

  Kawasaki, Masahiro ^a   Oikawa, Tetsuo ^a   Ibe, Katsuhiko ^a   Park, Kyung Ho ^b   Shiojiri, Makoto ^c  

^a JEOL LTD   (Japan)

^b TEXAS INSTRUMENTS   (United States)

^c KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

DRAM; EDS; Elemental mapping; FE (S)TEM; Quantitative analysis

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAPPING; NITROGEN; OXYGEN; PHOSPHORUS; SILICON OXIDES; SILICON WAFERS; SINGLE CRYSTALS;

DYNAMIC RANDOM ACCESS MEMORY; ELEMENTAL DISTRIBUTION; ELEMENTAL MAPPING; FIELD EMISSION SCANNING; FIELD-EMISSION (SCANNING) TRANSMISSION ELECTRON MICROSCOPE; MULTI-LAYERS; POLY-CRYSTALLINE SILICON; SCANNING TRANSMISSION ELECTRON MICROSCOPES; TRANSMISSION ELECTRON MICROSCOPY IMAGES; X RAY INTENSITY;

SILICA;

EID: 0031688845     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023600     Document Type: Article

References (12)

1. Honda T, Tomita T, Kaneyama T, and Ishida Y (1994) Field emission ultrahigh-resolution analytical electron microscope. Ultramicroscopy 54: 132-144.
2. Bando Y (1994) Microstructure analysis of advanced ceramics by high-resolution analytical transmission electron microscopy. J. Electron Micros. 44: 115-123.
3. Mullan C A, Weatherly G C, and Thompson D A (1996) STEM analysis of compositional modulations in InGaAsP films grown on patterned substrates. JEOL News 32E-1: 12-15.
4. Grevenor C R M, Batson P E, Smith D A, and Wong C (1984) As segregation to grain boundaries in Si. Philosophical Magazine A 50: 409-423.
5. Park K H, Hashimoto S, Kawasaki M, and Ibe K (1995) Subnanometric elemental analysis on ULSI devices with FEG-TEM. In: Institute of Physics Conference Series No. 146, ed. Cullis A G and Staton-Bevan A E, pp. 575-578, (The institute of Physics, London).
6. Cook J, Sloan J, Chu A, Heesom R, Green M L H, Hutchison J L, and Kawasaki M (1996) Identifying materials incorporated into carbon nanotubes by HREM and microanalysis. JEOL News 32E-1: 2-5.
7. Newbury D E (1997) Chemical compositional mapping by microbeam analysis at the micrometer scale and finer. Microelectronics J. 28: 489-508.
8. Murakoshi H, Kakibayashi H, and Tsuchiya T (1996) High resolution X-ray elemental mapping using 300-kV field emission TEM. J. Electron Microsc. 45: 236-238.
9. Goldstein J I, Williams D B, and Cliff G (1986) Beam broadening and X-ray spatial resolution. In: Principles of analytical electron microscopy, ed. Joy D C, Romig A D, and Goldstein J I, pp. 191-204, (Plenum, New York).
10. Reed S J B (1982) The single-scattering model and spatial resolution in X-ray analysis of thin foils. Ultramicroscopy 7: 405-410.
11. Mori N, Oikawa T, Harada Y, and Miyahara J (1990) Development of the imaging plate for the transmission electron microscope and its characteristics. J. Electron Microsc. 39: 433-436.
12. Goldstein J I, Williams D B, and Cliff G (1986) X-ray statistics -Errors in X-ray analysis in the AEM. In: Principles of analytical electron microscopy, ed. Joy D C, Romig A D, and Goldstein J I, pp. 188-189, (Plenum, New York).