Optical recording in Ga and in-doped zinc oxide thin films grown by radio-frequency magnetron sputtering

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 1 PART A/B, 1998, Pages

  Matsushita, Tatsuhiko ^a   Suzuki, Akio ^a   Toda, Shogo ^a   Aoki, Takanori ^a   Okuda, Masahiro ^b  

^a OSAKA SANGYO UNIVERSITY   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

High density optical recording films; Large transmittance changes; rf magnetron sputtering; Zn Ga In oxide film

Indexed keywords

GLASS; MAGNETRON SPUTTERING; NEODYMIUM LASERS; OPTICAL PROPERTIES; OPTICAL RECORDING; THERMODYNAMIC PROPERTIES; ZINC OXIDE;

HIGH DENSITY OPTICAL RECORDING FILM; LARGE TRANSMITTANCE CHANGE; ZINC GALLIUM INDIUM OXIDE FILM;

THIN FILMS;

EID: 0031650563     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l50     Document Type: Article

References (14)

1. S. Nakamura, M. Senou, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto and H. Kiyoku: Appl. Phys. Lett. 70 (1997) 868.
2. P. Zu, Z. K. Tang, G. K. L. Wang, M. Kawasaki, A. Ohtomo, H. Koinuma and Y. Segawa: Solid State Commun. 103 (1997) 459.
3. D. M. Bagnall, Y. F. Chen, Z. Zhu and T. Yao: Appl. Phys. Lett. 70 (1997) 2230.
4. A. Suzuki, T. Matsushita, H. Yamanishi, D. Tanaka, T. Aoki and M. Okuda: Jpn. J. Appl. Phys. 35 (1996) L1603.
5. A. Suzuki, T. Matsushita and M. Okuda: Sinku 38 (1995) 66 [in Japanese].
6. A. Suzuki, T. Matsushita, Y. Sakamoto, N. Wada, T. Fukuda, H. Fujiwara and M. Okuda: Jpn. J. Appl. Phys. 35 (1996) 5457.
7. T. Matsushita, A. Suzuki, Y. Kamitani, M. Okuda and H. Naito: Phys. Status Solidi(a) 133 (1992) 395.
8. J. Dutkiewicz, Z. Moser, L. Zabdyr, D. D. Goil, T. G. Chart, I. Ansara and C. Girard: Binary Alloing Phase Diagrams, ed. T.B. Masalski (ASM International, Ohio, 1990) 2nd ed., Vol. 2, p. 1878.
9. J. Dutkiewicz and W. Zakulski: Binary Alloying Phase Diagram, ed. T.B. Masalski (ASM International, Ohio, 1990) 2nd ed., Vol. 2, p. 2316.
10. T. Omata, N. Ueda, K. Ueda and H. Kawazoe: Appl. Phys. Lett. 64 (1994) 1077.
11. M. Orita, H. Sakai, M. Takeuchi , Y. Yamaguchi, T. Fujimoto and I. Kojima: Trans. Mater. Res. Soc. Jpn. 20 (1996) 573.
12. T. Minami, H. Sonohara, T. Kakumu and S. Takata: Jpn. J. Appl. Phys. 34 (1995) L971.
13. N. Akahira, T. Ohta, N. Yamada, M. Takenaga and T. Yamashita: Proc. SPIE 329 (1982) 195.
14. N. Yamada, E. Ohno, K. Nishiuchi and N. Akahira: J. Appl. Phys. 69 (1991) 2849.