Homoepitaxial diamond synthesis by DC arc plasma jet chemical vapor deposition

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 5 A, 1996, Pages

  Higa, Akira ^a   Hatta, Akimitsu ^a   Ito, Toshimichi ^a   Maehama, Takehiro ^a   Toguchi, Minoru ^a   Hiraki, Akio ^a  

^a UNIVERSITY OF THE RYUKYUS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; CATHODOLUMINESCENCE; CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; HIGH PRESSURE EFFECTS; METHANE; PLASMA JETS; SUBSTRATES; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY CRYSTALLOGRAPHY;

EPITAXIAL FILM; HOMOEPITAXIAL DIAMOND FILM; IRREGULAR GRAIN PARTICLES; PLASMA JET CHEMICAL VAPOR DEPOSITION; PYRAMIDAL HILLOCKS; ROCKING CURVE; SUBSTRATE TEMPERATURE; X RAY DOUBLE CRYSTAL ANALYSIS;

DIAMOND FILMS;

EID: 0030145381     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l577     Document Type: Article

References (19)