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Shinku/Journal of the Vacuum Society of Japan

Volumn 41, Issue 6, 1998, Pages 574-580

Chemically Polished Aluminum Alloys with Low Outgassing Rate

(6) Inayoshi, Sakae a Saito, Kazuya a Tsukahara, Sonoko a Ishizawa, Katsunobu b Nomura, Takeshi b Kanazawa, Minoru b

a ULVAC INC (Japan)

b San ai Plant Construction Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC CORROSION; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL CLEANING; CHEMICAL POLISHING; CORROSION RESISTANCE; DEGASSING; DESORPTION; SURFACE ROUGHNESS;

ALUMINUM ALLOY 5052; ALUMINUM ALLOY 6061; BRUNAUER-EMMETT-TELLER (BET) METHOD; HUMIDITY CABINET TESTS; THERMAL DESORPTION SPECTROSCOPY;

ALUMINUM ALLOYS;

EID: 0031638335 PISSN: 05598516 EISSN: None Source Type: Journal
DOI: 10.3131/jvsj.41.574 Document Type: Article

Times cited : (3)

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