Surface Treatment for Aluminum Alloys with Low Outgassing Rate

Shinku

Volumn 38, Issue 3, 1995, Pages 199-202

  Inayoshi, Sakae ^a   Saito, Kazuya ^a   Tsukahara, Sonoko ^a   Ishizawa, Katsunobu ^b   Nomura, Takeru ^b   Kanazawa, Minoru ^b  

^a ULVAC INC   (Japan)

^b San ai Plant Construction Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009593129     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.38.199     Document Type: Article

References (4)

1. M. Miyamoto, Y. Sumi, S. Komaki, N. Naruchima and H. Ishimaru: J. Vac. Sci. and Technol., A4 (1986) 2515.
2. M. Suemitsu, T. Kaneko and N. Miyamoto: J. Vac. Sci. and Technol., A5 (1987) 37.
3. H. J. Halama and J. C. Herrera: J. Vac. Sci. and Technol. 13 (1976) 463.
4. A. G. Mathewson, J. P. Bacher, K. Booth, R. S. Calder, G. Dominichini, A. Grillot, N. Hilleret, F. LeNormand, and Unterlerchner: J. Vac. Sci. and Technol. A7 (1987) 77.