Determination of ohmic contacts to n-type 6H-and polycrystalline 3C-SiC using circular transmission line structures

Diamond and Related Materials

Volumn 7, Issue 1, 1998, Pages 77-80

  Kriz, J ^a   Gottfried, K ^a   Kaufmann, C ^a   Gessner T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Circular transmission line method; Ohmic contacts; TiW; W; WSi2

Indexed keywords

CALCULATIONS; ELECTRIC RESISTANCE; MATHEMATICAL MODELS; OHMIC CONTACTS; POLYCRYSTALS; TITANIUM; TUNGSTEN;

SILICON CARBIDE;

EID: 0031619033     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00191-x     Document Type: Article

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