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Surface Science

Volumn 387, Issue 1-3, 1997, Pages

Energetics of void enlargement in thermally grown ultrathin Si-oxide on Si(001)

(3) Tang, Shaoping a Wei, Yi a Wallace, Robert M a

a TEXAS INSTRUMENTS (United States)

Author keywords

Density functional theory; Diffusion; Scanning tunneling microscopy; Si monomer; Surface; Void formation

Indexed keywords

ACTIVATION ENERGY; COMPUTATIONAL METHODS; DIFFUSION IN SOLIDS; MONOMERS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR GROWTH; SILICA; SURFACE PHENOMENA;

DENSITY FUNCTIONAL THEORY; VOID FORMATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0031559972 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(97)00469-X Document Type: Article

Times cited : (5)

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