Fast and sensitive suspended YBaCuO microbolometers using silicon separated by implanted oxygen substrates

Applied Physics Letters

Volumn 70, Issue 1, 1997, Pages 123-125

  Méchin, Laurence ^a   Villégier, Jean Claude ^a   Bloyet, Daniel ^b  

^a CEA GRENOBLE   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CERIUM COMPOUNDS; CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC VARIABLES MEASUREMENT; FABRICATION; PHOTOLITHOGRAPHY; PULSED LASER APPLICATIONS; SILICON WAFERS; THERMAL CONDUCTIVITY; YTTRIUM COMPOUNDS;

CRITICAL TEMPERATURE; MICROBOLOMETERS; OPTICAL NOISE EQUIVALENT POWER; PULSED LASER ABLATION; SILICON SEPARATED BY IMPLANTED OXYGEN SUBSTRATES; SUSPENDED BRIDGE STRUCTURE; YTTRIUM BARIUM COPPER OXIDE;

BOLOMETERS;

EID: 0031555592     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119282     Document Type: Article

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