Inelastic scattering dynamics of hyperthermal fluorine atoms on a fluorinated silicon surface

Journal of Physical Chemistry A

Volumn 101, Issue 36, 1997, Pages 6549-6555

  Minton, Timothy K ^a   Giapis, Konstantinos P ^b   Moore, Teresa ^b  

^a MONTANA STATE UNIVERSITY   (United States)

^b California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER; ETCHING; SCATTERING; SILICON COMPOUNDS;

HYPERTHERMAL FLUORINE ATOMS; INELASTIC SCATTERING DYNAMICS; SILICON FLUORIDE; TRANSLATIONAL ENERGY;

FLUORINE;

EID: 0031552976     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp970767m     Document Type: Article

References (21)

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13. The sample cleaning procedure involved degreasing for 10 min in boiling trichloroethylene followed by 10 min in boiling ethanol (200 proof USP), a dip in nanopure water, followed by etching for 15 s in concentrated HF (49%), a rinse in nanopure water, and finally a dip in boiling ethanol.
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16. i = 60°.
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19. The relative flux of F atoms scattered at all detected angles for all conditions was determined from the direct inversion method by integrating each derived total translational energy distribution (which is proportional to flux) from 0.2 kJ/mol to the average beam energy. We found that the calculation of relative flux as a function of final angle was insensitive to the temporal width of the incident beam pulses used in our experiments.
20. Other energy thresholds in the range ∼100-250 kJ/mol show similar qualitative behavior; however, when energy ranges that end below 200 kJ/mol are used, the angular distributions decrease with angle much faster than a cosine distribution, and when the range is extended beyond 200 kJ/mol, the angular distribution decreases slower than a cosine distribution.
21. Preliminary calculations by one of the authors (K.P.G.) show that the cumulative flux of atoms scattered through double-, triple-, etc., bounce collisions follows closely a cosine distribution. In fact, the calculated distribution falls off slightly faster than a cosine function and resembles the 4-200 kJ/mol curve in Figure 9.