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Volumn 9, Issue 11, 1997, Pages 857-860
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Mesoscopic systems: Will they ever be manufacturable?
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Author keywords
[No Author keywords available]
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Indexed keywords
COST EFFECTIVENESS;
FIELD EFFECT TRANSISTORS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MOLECULAR BEAM EPITAXY;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR QUANTUM DOTS;
SILICON WAFERS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
DOUBLE CRYSTAL X RAY DIFFRACTION;
MESOSCOPIC SYSTEMS;
MICROELECTRONICS;
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EID: 0031551383
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/adma.19970091103 Document Type: Review |
Times cited : (4)
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References (14)
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