High-Δn silica-on-silicon channel waveguides based on sol-gel germanophosphosilicate glass

Electronics Letters

Volumn 33, Issue 14, 1997, Pages 1216-1217

  Syms, R R A ^a   Schneider, V M ^a   Huang, W ^a   Ahmad, M M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Optical waveguides; Sol gel processing

Indexed keywords

ANNEALING; COATING TECHNIQUES; ELECTRIC LOSS ANGLE MEASUREMENT; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SOL-GELS;

GERMANOPHOSPHOSILICATE GLASSES; INSERTION LOSS; SPIN COATING;

OPTICAL WAVEGUIDES;

EID: 0031551219     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970851     Document Type: Article

References (5)

1. HOLMES, A.S., SYMS, R.R.A., MlNG LI, , and GREEN, M.: 'Fabrication of buried channel waveguides on silicon substrates using spin-onglass', Appl. Opt., 1993, 32, pp. 4916-4921
2. SYMS, R.R.A., HUANG, W., and SCHNEIDER, V.M.: 'Optimisation of borophosphosilicate glass compositions for silica-on-silicon integrated optical circuits fabricated by the sol-gel process', Electron. Lett., 1996, 32, pp. 1233-1234
3. 2 silica waveguides fabricated by flame hydrolysis deposition method', Electron. Lett., 1990, 26, pp. 327-328
4. MARTIN, A., and GREEN, M.: 'Sol-gel nano-porous silica-titania thin films with liquid fill for optical interferometric sensors'. Proc. SPIE, 1990, Vol. 1328, pp. 352-363
5. BERNARDS, T.N.M., VAN BOMMEL, M.J., OOMEN, E.W.J.L., and BOONSTRA, A.H.: 'Hydrolysis-condensation mechanism of two-step sol-gel process of mixtures of TEOS and TEOG', J. Non.-Cryst. Solids, 1992, 147, 148, pp. 13-17