Study on emission yields of negative- and positive-ion induced secondary electron from thin SiO2 film

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 282-285

  Ishikawa, Junzo ^a   Tsuji, Hiroshi ^a   Ikeda, Shigeo ^a   Gotoh, Yasuhito ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CHARGE; ELECTRIC INSULATORS; ELECTRON EMISSION; ION BOMBARDMENT; ION IMPLANTATION; LEAKAGE CURRENTS; THIN FILMS;

KINETIC EMISSION;

SILICA;

EID: 0031547829     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00940-8     Document Type: Article

References (16)

1. J. Ishikawa, Rev. Sci. Instrum. 65 (1994) 1290.
2. J. Ishikawa, H. Tsuji, Y. Toyota, Y. Gotoh, et al., Nucl. Instr. and Meth. B 96(1995)7.
3. H. Tsuji, Y. Toyota, J. Ishikawa, S. Sakai, et al., Ion Implantation Technology-94 (Elsevier, Amsterdam, 1995) pp. 612-615.
4. S. Sakai, M. Tanjyo, K. Matsuda, Y. Gotoh, et al., Ion Implantation Technology-92 (Elsevier, Amsterdam, 1993) pp. 617-620.
5. Y. Toyota, H. Tsuji, Y. Gotoh and J. Ishikawa, Jpn. J. Appl. Phys. 34 (1995) 6487.
6. G.M. Batanov, Sov. Phys.-Solid State 3 (1961) 409.
7. L.A. Dietz, Rev. Sci. Instrum. 36 (1965) 1763.
8. J.S. Stein and F.A. White, J. Appl. Phys. 43 (1972) 2617.
9. R.J. Beuhler and L. Friedman, J. Appl. Phys. 48 (1977) 3928.
10. E.S. Parilis, F.F. Umarov, L.M. Kishinevsky, V.K. Verleger, N.Y. Turaev, S.L. Nizhnaya, B.E. Baklitzky and I.S. Bitensky, Atomic Collisions on Solid Surfaces (North-Holland, Amsterdam, 1993), Chap. 11, p. 391.
11. J. Ishikawa, Rev. Sci. Instrum. 63 (1992) 2368.
12. H.D. Hagstrum, Phys. Rev. 96 (1954) 336.
13. R.A. Baragila, E.V. Alonso and A. Oliva-Florio, Phys. Rev. B 19 (1979) 121.
14. A. Clouvas, A. Katsanos, B. Farizon-Mazuy, M. Farizon and M.J. Gaillard, Phys. Rev. B 43 (1991) 2496.
15. A. Clouvas, A. Katsanos, B. Farizon-Mazuy, M. Farizon, M.J. Gaillard and S. Ousakit, Phys. Rev. B 48 (1993) 6832.
16. H. Tsuji, J. Ishikawa, S. Ikeda and Y. Gotoh, these Proceedings (IBMM'96), Nucl. Instr. and Meth. B 127/128, (1997) 278.